How to increase the number of points for ring shape
Alisa
Friday 26th May 2023
Hi,
I drew the ring slot with the width ranging from 100 - 250 nm. However, from the SEM image after fabrication, there are several ripples, so I think I should increase the number of points of the ring. So far I found that in the *setup/defaults/circular*, angular resolution = 5 angle/point and bezier iteration = 4. Will more angular resolution result in more number of points? or can you recommend how to do so?
Thanks a lot!
Alisa
Jürgen LayoutEditorFull Friday 26th May 2023
With a angular resolution of 5 deg/point you will have 360deg/5= 72 points on the full circle or ring ring. If case you increase this value to 1deg/point you will get 360 points of a full circle or full ring.
Alisa
Friday 26th May 2023
Thank you so much for a quick response!